Characterization and metrology for ULSI technology
- Författare
- David G. Seiler International Conference on Characterization and Metrology for ULSI Technology ( : 2003 Austin)
- (2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas 24-28 March 2003 editors: David G. Seiler .., Härtill CD-ROM, Includes bibliographical references and indexes)
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| American Institute of Physics | 2003 | USA, Melville, N.Y | xviii, 818 sidor. ill. |